Fully Integrated MEMS Micropump and Miniaturized Mass Flow Sensor as Basic Components for a Microdosing System.
Micromachines November 21, 2024 Martin Seidl, Gabriele Schrag
Despite major advances in the field of actuator technology for microsystems, miniaturized microfluidic actuation systems for mobile devices are still not common in the market. We present a micropump concept and an associated mass flow sensor design, which, in combination, have the potential to form the basis for an integrated microfluidic development platform for microfluidic systems in general...